TMC Technical Manufacturing Corporation

Summer 2003

In this Issue: TMC Introduces the CleanTop® II DoubleDensity™ Optical Top TableTop™ A-P Vibration Isolation for Small Spaces Ultratech Stepper Chooses TMC for Advanced Vibration Control NEW, Faraday Cage options and features

	CleanTop^® II DoubleDensity™ construction (288 holes per ft2)	Standard TMC CleanTop® II construction (144 holes per ft2)
TMC Introduces the CleanTop^® II DoubleDensity™ Optical Top, Doubling the Number of Tapped Holes TMC has introduced the CleanTop^® II DoubleDensity™ optical top, offering twice the number of tapped holes as our existing CleanTop^® II optical tops. Doubling the number of holes allows more precise location of positioning equipment and reduces the need for adapter plates used for more sparce hole patterns. The new tops combine our existing uniquely small honeycomb cell size (0.50 inch2) with our patented CleanTop II individual sealed hole technology. And because the new tops use our existing honeycomb core design, which is twice the cell density of any of our competitors' products, there are absolutely no changes to any performance specifications. The double-density top is the latest in TMC’s long history of innovations in the optical top industry. Features include: twice the number of tapped holes as conventional one-inch or 25-mm grids (288 holes per foot2, 3,200 holes per m3); twice the number of honeycomb cells (0.50 inch2) as our nearest competitor; the hole pattern is 1/4-20 on one-inch staggered centers or M6 on 25-mm staggered centers; and the core density is unchanged – the highest in the industry at 13.3 pounds per foot3. The double-density pattern is available with all TMC CleanTop II models.
Back to the top		DoubleDensity™ pattern available with all CleanTop® II models


TableTop™ A-P Vibration Isolation for Small Spaces. Our new TableTop™ A-P is a lightweight, modular vibration isolation system that combines exceptional low-frequency passive isolation with an optional Q-Damp™ active damping module. Its compact design (less than 50 pounds) is portable, and its passive vibration isolation is comparable to TMC’s full-size industry standard 63-500 Series high-performance lab table. TableTop™ A-P – Vibration Isolation for Small Spaces It offers the best vibration isolation solution when sensitive work is performed, such as scanning probem microscopy, bench-top metrology or interferometry, in a noisy, less than optimal work area. It is easily upgradeable to active damping, requiring 10 minutes and a screwdriver. The Q-Damp active damping module significantly improves the performance of the passive system by canceling the resonant amplification of the A-P’s air isolator. The patented TableTop A-P is compatible with TMC’s BenchTop Faraday Cage. The newly designed, 40-inch-tall cage includes a baseplate of reinforced stainless steel that supports the compact A-P. The cage also features a “window-shade” typeretracting panel and 2-inch diameter holes for cable passage.
		Nikon TE-2000 on TableTop™ A-P. Photo courtesy of Micro Video Instruments
Back to the top Ultratech Stepper Chooses TMC for Advanced Vibration Control
Ultratech Stepper, Inc. has chosen TMC’s Electro-Damp® II Active Vibration Control System as the new platform for its 200 and 300 mm Saturn Spectrum and Titan Wafer Stepper family. “ We are extremely pleased to be partnered with Ultratech for their vibration control and stage feedforward cancellation requirements,” said Ulf Heide, President of TMC. “At TMC, we have been providing advanced vibration control solutions to stepper companies for over 20 years. Over that time, there has been an incredible growth in the needs of our customers and the sophistication of our solutions.” Ultratech plans to incorporate Electro-Damp® II into its steppers for semiconductor, advanced packaging, microlithography, nanotechnology, and optical networking applications. Each patented Electro-Damp® II system will include TMC’s DC-2000 digital controller, non-contacting electronic valving system, Gimbal Piston™ isolators, and high force linear motors. The isolation system will be incorporated into a highly engineered frame, also made by TMC, which will be the foundation of the tool. “ We are very pleased that our technology, manufacturing capabilities, and products are such a perfect match for Ultratech,” said Steve Ryan, V.P., Marketing, of TMC. “Steppers have consistently offered the greatest challenge to precision vibration control of any application we face.” Electro-Damp® II uses stage feedforward cancellation as well as active feedback to provide the low frequency vibration cancellation and fast settling time of stage-induced motion demanded by a state-of-the-art stepper. Ultratech Saturn Spectrum 300e2 Photo courtesy of Ultratech Stepper, Inc. Back to the top
NEW Faraday Cage options and features from TMC!
Type II Faraday Cage*			BenchTop Faraday Cage
Optional "U" -shaped hanging shelf New 2" Diameter holes for cable passage Optional non-isolated side shelf oriented front to rear optional armrest pads are now available with Faraday Cages *Full perimeter enclosure required to mount cage. Back to the top			New 2" diameter holes for cable passage Stainless steel baseplate Bench-mounted cage does not require vibration isolation table