.From 1969 until the early 1990's, TMC self-leveling air vibration isolation systems were second to none in overall vibration isolation performance.  Recently, the relentless drive in industry toward ever-higher precision has required us to undertake a large, full-time R&D effort in order to develop more advanced products to meet our customers’ needs.

Currently, TMC employs several scientists and engineers whose sole responsibility is to use advanced control theory to develop the most sophisticated vibration isolation systems commercially available.

.Since 1996, this research effort has begun to bear fruit. First, we introduced PEPS^®, the Precision Electronic Positioning System which uses non-contacting height sensors to control the float height of an isolator to within a few microns. Shortly thereafter, we launched  PEPS-VX^®, an add-on to PEPS^® which includes inertial vibration sensors and cancels vertical vibration actively from 0.5 to 8 Hz by modulating the pressure of the air isolators.

CSP^® allows us to achieve an extremely low natural frequency horizontally (0.3 Hz) passively, at a low-cost. MaxDamp^® is another low-cost solution to the problem of settling time of an isolated surface in response to motorized stage-induced motion. AccuDock™ quickly achieves repeatable docking of an isolated surface for quick loading and unloading of wafers or other objects with a robot.

In 1998, TMC purchased the STACIS^® and ElectroDamp^® product lines from Barry Controls, a division of Applied Power Corporation. STACIS is simply the most advanced commercial vibration isolation system in the world with piezoelectric actuators canceling motion from 0.3 Hz to 250 Hz in six degrees of freedom.

In recent years, TMC has not only continued to improve our existing advanced product line, but has introduced a range of new, breakthrough products. Among these are Mag-NetX™ Magnetic Field Cancellation Systems. In addition, our new Electro-Damp^® PZT is a low-cost, compact, piezoelectric active isolator designed to be mounted inside precision semiconductor tools. Finally, our most recent introductions, TableTop PZT™ and FloorPlatform PZT™, are versions of Electro-Damp^® PZT configured for bench-top and floor-mounted instruments.